AS ISO 14237-2006

Surface chemical analysis - Secondary-ion mass spectrometry - Determination of boron atomic concentration in silicon using uniformly doped materials

Standards Australia, 10/20/2006

Publisher: AS

File Format: PDF

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Description

Published:20/10/2006

Pages:22

File Size:1 file , 690 KB

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Adopts ISO 14237:2000 to specify a secondary-ion mass spectrometric method for the determination of boron atomic concentration in single-crystalline silicon, using uniformly doped materials calibrated by a certified reference material implanted with boron.

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