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ASTM International, 10/15/2011
Publisher: ASTM
File Format: PDF
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Published:15/10/2011
Pages:2
File Size:1 file , 63 KB
Note:This product is unavailable in Russia, Ukraine, Belarus
1.1 This standard consists of terms and definitions pertaining to measurements taken on thin, reflecting films, such as found in microelectromechanical systems (MEMS) materials. In particular, the terms are related to the standards in Section , which were generated by Committee E08 on Fatigue and Fracture. Terminology E 1823 Relating to Fatigue and Fracture Testing is applicable to this standard.
1.2 The terms are listed in alphabetical order.
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