ASTM E673-03

Standard Terminology Relating to Surface Analysis (Withdrawn 2012)

ASTM International, 12/01/2003

Publisher: ASTM

File Format: PDF

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Description

Published:01/12/2003

Pages:10

File Size:1 file , 94 KB

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1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).

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