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ASTM International, 12/01/2003
Publisher: ASTM
File Format: PDF
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Published:01/12/2003
Pages:10
File Size:1 file , 94 KB
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1.1 This terminology is related to the various disciplines involved in surface analysis.
1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).
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