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ASTM International, 01/01/1998
Publisher: ASTM
File Format: PDF
$29.00$58.00
Published:01/01/1998
Pages:10
File Size:1 file , 64 KB
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1.1 This terminology is related to the various disciplines involved in surface analysis.
1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).
Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope
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