• ASTM F1238-95(1999)

ASTM F1238-95(1999)

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

ASTM International, 12/10/1999

Publisher: ASTM

File Format: PDF

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Published:10/12/1999

Pages:2

File Size:1 file , 27 KB

Note:This product is unavailable in Russia, Ukraine, Belarus

1.1 This specification covers sputtering targets fabricated from metallic silicides (molybdenum silicide, tantalum silicide, titanium silicide, and tungsten silicide). These targets are referred to as refractory silicide targets, and are intended for use in microelectronic applications.

1.2 The values stated in SI units are regarded as standard.

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