• ASTM F1367-98

ASTM F1367-98

Standard Specification for Chromium Sputtering Targets for Thin Film Applications

ASTM International, 08/10/1998

Publisher: ASTM

File Format: PDF

$27.00$54.00


Published:10/08/1998

Pages:2

File Size:1 file , 23 KB

Note:This product is unavailable in Russia, Ukraine, Belarus

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are regarded as standard.

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