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ASTM International, 01/01/2002
Publisher: ASTM
File Format: PDF
$32.00$65.00
Published:01/01/2002
Pages:13
Note:This product is unavailable in Russia, Ukraine, Belarus
This standard was transferred to SEMI (www.semi.org) May 2003
1.1 The purpose of this guide is to list, illustrate, and provide reference for various characteristic features and contaminants that are seen on highly specular silicon wafers. Recommended practices for delineation and observation of these artifacts are referenced. The artifacts described in this guide are intended to parallel and support the content of the SEMI M18. These artifacts and common synonyms are arranged alphabetically in Tables 1 and 2 and illustrated in Figs. 1-68 .
Standard Specification for Steel, Sheet, Carbon, Structural, and High-Strength, Low-Alloy, Hot-Rolled and Cold-Rolled, General Requirements for
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Standard Classification for Specifying Silicone Adhesives and Sealants for Transportation Applications
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Standard Specification for Alloy and Structural Alloy Steel, Sheet and Strip, Hot-Rolled and Cold-Rolled
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Standard Test Method for Fineness of Dispersion of Pigment-Vehicle Systems by Hegman-Type Gage
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