ASTM F1709-97(2016)

Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications

ASTM International, 05/01/2016

Publisher: ASTM

File Format: PDF

$21.00$42.00

Description

Published:01/05/2016

Pages:3

File Size:1 file , 66 KB

Note:This product is unavailable in Russia, Ukraine, Belarus

1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.

1.2.1 The grade designation is a measure of total metallic impurity content. The grade designation does not necessarily indicate suitability for a particular application because factors other than total metallic impurity may influence performance.

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