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ASTM International, 05/10/2000
Publisher: ASTM
File Format: PDF
$25.00$50.00
Published:10/05/2000
Pages:4
File Size:1 file , 40 KB
Note:This product is unavailable in Russia, Ukraine, Belarus
1.1 This method covers the size distribution analysis of particulate contamination, 5 m or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (33 % of the average of two runs) should be expected for replicate counts on the same sample.
Note 1--For satisfactory results on clean parts, it is recommended that all procedures involved in sample preparation be conducted under a dust shield.
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