ASTM F576-00

Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry

ASTM International, 01/01/2000

Publisher: ASTM

File Format: PDF

$29.00$58.00

Published:01/01/2000

Pages:9

File Size:1 file , 280 KB

Note:This product is unavailable in Russia, Ukraine, Belarus

Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry

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