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ASTM International, 01/01/1999
Publisher: ASTM
File Format: PDF
$27.00$54.00
Published:01/01/1999
Pages:4
File Size:1 file , 54 KB
Note:This product is unavailable in Russia, Ukraine, Belarus
This standard was transferred to SEMI (www.semi.org) May 2003
1.1 This practice covers the surface preparation of silicon samples prior to measurement of resistivity variations by the spreading resistance technique.
1.2 Separate procedures are given for preparation of large-area specimens for measurement of lateral resistivity variations and for preparation of bevel-sectioned specimens (usually small chips) for measurement of vertical variations of resistivity (depth profiling).
1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
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