BS 07/30172404 DC

BS EN 62047-9. Semiconductor devices. Micro-electromechanical devices. Part 9. Wafer to wafer bonding strength measurement for MEMS

BSI Group, 12/05/2007

Publisher: BS

File Format: PDF

$129.00$258.60

Description

Published:05/12/2007

Pages:11

Cross References:
IEC 60068-2-1:1990
IEC 60068-2-81:2003
IEC 60721-2-1:1982
IEC 60721-3-0:1984
IEC 60721-3-1:1997
IEC 60747-1:1983
IEC 60747-14-1:2000
IEC 60749-1:2002
ISO/IEC GUIDE 2:2004

All current amendments available at time of purchase are included with the purchase of this document.

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