BS 10/30205425 DC

BS IEC 62047-12. Semiconductor devices. Micro-electromechanical devices. Part 12. A method for fatigue testing thin film materials using the resonant vibration of a MEMS structure

BSI Group, 01/26/2010

Publisher: BS

File Format: PDF

$119.00$238.84

Description

Published:26/01/2010

Pages:25

Cross References:
ISO 12107:2003
IEC 62047-2:2006
IEC 62047-3:2006

All current amendments available at time of purchase are included with the purchase of this document.

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