BS 10/30211446 DC

BS EN 62047-11. Semiconductor devices. Micro-electromechanical devices. Part 11. Test method for linear thermal expansion coefficients of MEMS materials

BSI Group, 03/11/2010

Publisher: BS

File Format: PDF

$121.00$242.05

Description

Published:11/03/2010

Pages:14

Cross References:
IEC 62047-1
IEC 62047-3

All current amendments available at time of purchase are included with the purchase of this document.

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