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BS PD IEC TR 63258:2021

Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films

BSI Group, 03/25/2021

Publisher: BS

File Format: PDF

$125.00$251.46


Published:25/03/2021

Pages:24

File Size:1 file , 1.1 MB

Note:This product is unavailable in Ukraine, Russia, Belarus

This document, which is a Technical Report, is focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

All current amendments available at time of purchase are included with the purchase of this document.

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