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Deutsches Institut Fur Normung E.V. (German National Standard), 01/01/1977
Publisher: DIN
File Format: PDF
$12.00$25.02
Published:01/01/1977
Pages:2
File Size:1 file
Note:This product is unavailable in Ukraine, Russia, Belarus
Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C<(Index)1>-C<(Index)3>-hydrocarbons in gaseous hydrogen chloride by gaschromatography
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