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  • IEC 62047-21 Ed. 1.0 b:2014

IEC 62047-21 Ed. 1.0 b:2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

International Electrotechnical Commission, 06/19/2014

Publisher: IEC

File Format: PDF

$47.00$95.00


Published:19/06/2014

Pages:26

File Size:1 file , 480 KB

Note:This product is unavailable in Ukraine, Russia, Belarus

IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.

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