IEC 62047-26 Ed. 1.0 b:2016

Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures

International Electrotechnical Commission, 01/07/2016

Publisher: IEC

File Format: PDF

$117.00$234.00


Published:07/01/2016

Pages:57

File Size:1 file , 1 MB

Note:This product is unavailable in Ukraine, Russia, Belarus

IEC 62047-26:2016 specifies descriptions of trench structure and needle structure in a micrometer scale. In addition, it provides examples of measurement for the geometry of both structures. For trench structures, this standard applies to structures with a depth of 1 µm to 100 µm; walls and trenches with respective widths of 5 µm to 150 µm; and aspect ratio of 0,006 7 to 20. For needle structures, the standard applies to structures with three or four faces with a height, horizontal width and vertical width of 2 µm or larger, and with dimensions that fit inside a cube with sides of 100 µm. This standard is applicable to the structural design of MEMS and geometrical evaluation after MEMS processes.

More IEC standard pdf

IEC 60079-1 Ed. 7.0 b:2014

IEC 60079-1 Ed. 7.0 b:2014

Explosive atmospheres - Part 1: Equipment protection by flameproof enclosures "d"

$227.00 $455.00

IEC 61975 Ed. 1.1 b:2016

IEC 61975 Ed. 1.1 b:2016

High-voltage direct current (HVDC) installations - System tests CONSOLIDATED EDITION

$367.00 $734.00

IEC 60034-2-1 Ed. 2.0 b:2014

IEC 60034-2-1 Ed. 2.0 b:2014

Rotating electrical machines - Part 2-1: Standard methods for determining losses and efficiency from tests (excluding machines for traction vehicles)

$227.00 $455.00

IEC 61056-2 Ed. 3.0 b COR.1:2012

IEC 61056-2 Ed. 3.0 b COR.1:2012

Corrigendum 1 - General purpose lead-acid batteries (valve-regulated types) - Part 2: Dimensions, terminals and marking

$104.00 $208.26