IEC 62047-32 Ed. 1.0 b:2019

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

International Electrotechnical Commission, 01/24/2019

Publisher: IEC

File Format: PDF

$72.00$145.00

Description

Published:24/01/2019

Pages:37

File Size:1 file , 1.5 MB

Note:This product is unavailable in Ukraine, Russia, Belarus

IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.

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