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IEST RP-CC016.2

The Rate of Deposition of Nonvolatile Residue in Cleanrooms

Institute of Environmental Sciences and Technology, 04/01/2006

Publisher: IEST

File Format: PDF

$95.00$190.00


Published:01/04/2006

Pages:20

File Size:1 file , 680 KB

Note:This product is unavailable in Ukraine, Russia, Belarus

IEST RP-CC016.2 provides a uniform method and basis for determining the rate of deposition of nonvolatile residue (NVR) on surfaces in cleanrooms. In the design of the heating, ventilating, and air conditioning system, the selection of suitable filters, and the selection of materials used in the construction of the cleanroom, the requirements for the rate of deposition of NVR should be specified by the user. Designers of cleanrooms should consider the maximum deposition rates suggested by This RP when the deposition of NVR can affect the performance of products.

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